JPH0295235U - - Google Patents

Info

Publication number
JPH0295235U
JPH0295235U JP320989U JP320989U JPH0295235U JP H0295235 U JPH0295235 U JP H0295235U JP 320989 U JP320989 U JP 320989U JP 320989 U JP320989 U JP 320989U JP H0295235 U JPH0295235 U JP H0295235U
Authority
JP
Japan
Prior art keywords
inner tube
vapor phase
phase growth
reaction vessel
tube
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP320989U
Other languages
English (en)
Japanese (ja)
Other versions
JPH073635Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP320989U priority Critical patent/JPH073635Y2/ja
Publication of JPH0295235U publication Critical patent/JPH0295235U/ja
Application granted granted Critical
Publication of JPH073635Y2 publication Critical patent/JPH073635Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP320989U 1989-01-13 1989-01-13 気相成長装置 Expired - Lifetime JPH073635Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP320989U JPH073635Y2 (ja) 1989-01-13 1989-01-13 気相成長装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP320989U JPH073635Y2 (ja) 1989-01-13 1989-01-13 気相成長装置

Publications (2)

Publication Number Publication Date
JPH0295235U true JPH0295235U (en]) 1990-07-30
JPH073635Y2 JPH073635Y2 (ja) 1995-01-30

Family

ID=31204639

Family Applications (1)

Application Number Title Priority Date Filing Date
JP320989U Expired - Lifetime JPH073635Y2 (ja) 1989-01-13 1989-01-13 気相成長装置

Country Status (1)

Country Link
JP (1) JPH073635Y2 (en])

Also Published As

Publication number Publication date
JPH073635Y2 (ja) 1995-01-30

Similar Documents

Publication Publication Date Title
EP0032341B1 (fr) Dispositif d'atomisation d'un mélange réactionnel
BE893064A (fr) Procede et appareil de production d'un plasma gazeux active, et procede et appareil pour deposer de facon reactive un revetement en couches minces sur un substrat
CA2085497A1 (en) Continuous powder catalyst supply apparatus and catalyst supply system
JPH0295235U (en])
US3961003A (en) Method and apparatus for making elongated Si and SiC structures
EP0167374A3 (en) Chemical vapor deposition wafer boat
JPS55154537A (en) Method and apparatus for carrying molten metal
JPH11162856A (ja) 真空処理装置
JP2500759B2 (ja) 半導体製造装置
JPH0530350Y2 (en])
JPH0447955Y2 (en])
JPS6416632U (en])
JPH0330269U (en])
JPS63140619U (en])
JPH02250972A (ja) 化学気相成長装置
JPH0653142A (ja) 半導体薄膜気相成長装置
JPH05112870A (ja) 縦型減圧ｃｖｄ装置
JPS6418224A (en) Semiconductor manufacture equipment
JPH07100862B2 (ja) バレル型気相成長装置
JPS57175797A (en) Epitaxial growth under reduced pressure
JPS6447029U (en])
JPH03248415A (ja) 半導体装置の製造装置
JP2522481Y2 (ja) 縦型減圧ｃｖｄ装置用ボート
JPS56152737A (en) Chemical vapor deposition device using decreased pressure
JPH02142525U (en])

Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term